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Depositordc.contributorRonde, Markus
Funderdc.contributor.otherCENSISen_UK
Data Creatordc.creatorRondé, Markus
Data Creatordc.creatorTerry, Jonathan
Data Creatordc.creatorWalton, Anthony
Date Accessioneddc.date.accessioned2020-10-01T15:33:56Z
Citationdc.identifier.citationRondé, Markus; Terry, Jonathan; Walton, Anthony. (2020). Manipulating Etch Selectivities in XeF2 Vapour Etching, [dataset]. The University of Edinburgh. School of Engineering. Institute of Integrated Micro and Nanosystems.en
Persistent Identifierdc.identifier.urihttp://hdl.handle.net/10283/3765
Persistent Identifierdc.identifier.urihttps://doi.org/10.7488/ds/2929
Dataset Description (abstract)dc.description.abstractThis workbook contains the raw data for figures 2 - 8, some datasets were used to generate multiple figures. In this case, they are summarised in one datasheet. You can switch between them using the tabs at the bottom of the spread sheet. The experimental method was previously presented at the ICMTS conference in 2020, more details are available in: M. Rondé, A. J. Walton and J. G. Terry, "Test Structure for Measuring the Selectivity in Vapour Etch Processes," 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS), Edinburgh, United Kingdom, 2020, pp. 1-5, doi: 10.1109/ICMTS48187.2020.9107934. It is recommended to read this publication in order to fully understand how the data presented here was generateden_UK
Languagedc.language.isoengen_UK
Publisherdc.publisherThe University of Edinburgh. School of Engineering. Institute of Integrated Micro and Nanosystemsen_UK
Rightsdc.rightsCreative Commons Attribution 4.0 International Public Licenseen
Titledc.titleManipulating Etch Selectivities in XeF2 Vapour Etchingen_UK
Alternative Titledc.title.alternativeMEMSen_UK
Alternative Titledc.title.alternativeXeF2en_UK
Alternative Titledc.title.alternativevapour etchingen_UK
Alternative Titledc.title.alternativeselectivityen_UK
Typedc.typedataseten_UK
Embargo Datedc.date.embargo2021-01-31


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